For Ag/MG/YB coating cleaning process and auxiliary trolley instructions

① IQC

Conduct a visual inspection of the incoming mask and record the entire inspection process to avoid inconsistent confirmation results between both parties.

Inspect the surface of the mask with strong light for any abnormalities such as folds, hits, scratches, or desoldering.

Check the surface of the mask in the darkroom for dirt and rust spots.

During the inspection process, annotate any abnormal issues with diagrams and send them to the customer via email for confirmation.

Perform TP and CD inspections on the surface of the mask, with 36 points each for TP and CD inspections.

② Chemical membrane removal

Chemical film removal: Move the mask to the automatic cleaning line and perform chemical soaking and DI pure water cleaning according to the programmed soaking time (pure water resistance value:> 10M Ω).

Chemical membrane removal lif: Soak in 60 degree hot DI pure water for 45 minutes, rinse twice with DI pure water, and then soak in a DI pure water tank for 15 minutes.

Chemical film removal - Mg/Ag: Use electronic grade hydrogen peroxide solution for chemical film removal, soak for 50 minutes, (detect the reaction status and concentration of the tank solution every 15 minutes).

③ Soak in pure water

Use ultrasonic oscillation to remove residual liquid and micro particles on the surface of the mask, ensuring a clean surface (power: 1200w, frequency: 40Hz, time: 15 minutes).

④ Rust prevention cleaning

Rinse the mask with IPA for at least 10 minutes after removing the film to ensure that there is no rust residue on the surface.

The lifting speed of the automatic cleaning line is 5mm/S, and the left and right movement speed is 10mm/S (the program can be set to manual or automatic).

⑤ Bake

Transport the mask to a specialized drying vehicle for surface inspection and confirmation, ensuring no water stains remain.

Check for any residual watermarks on the surface of the mask using a strong light in the darkroom. If there are watermarks, wipe them with pure water and then dry them with alcohol.

After fixing the mask, place it in a dedicated dust-free drying oven. During the drying process, do not open the oven. The drying temperature is 60 ± 1 ℃ and the drying time is 180 minutes.

After opening the drying oven, fill it with nitrogen to ensure a positive pressure of 5-10Mpa inside the oven.